Abstract
In the present work, the titanium carbonitride coatings were deposited by the reactive magnetron sputtering method at different substrate bias: 0, −70 V, and −100 V. The effect of the substrate bias on the structure, composition, and mechanical and tribological properties of titanium carbonitride coatings was studied. Scanning electron microscopy, nanoindentation, sliding wear test (ball-on-disk method), X-ray phase, and elemental analysis methods were used to evaluate the tribological properties and microstructure of the thin coatings. The dependencies obtained resulted in the determination of the most preferred mode of deposition by magnetron sputtering at a negative substrate bias in an atmosphere of argon–acetylene–nitrogen.
Highlights
Hard protective coatings greatly contribute to the increase in wear resistance and corrosion resistance of metals/metal alloys [1,2,3]
titanium carbonitride (TiCN) coatings were deposited by reactive magnetron sputtering on a substrate with
TiCN coatings were deposited by reactive magnetron sputtering substrate with voltage in an argon–acetylene–nitrogen atmosphere
Summary
Hard protective coatings greatly contribute to the increase in wear resistance and corrosion resistance of metals/metal alloys [1,2,3]. The titanium carbonitride (TiCN) is of high relevance to create wear-resistant protective coatings with the purpose of ensuring the maximum wear resistance and service life of friction unit parts. TiCN is a more suitable coating for parts operating in constant friction due to its high resistance to abrasion and wear [4,5]. TiCN coatings are formed by mixing C and N in an FCC (face-centered cubic) structure and appear to have the best properties of the two original components, such as the plasticity of TiC and adhesion strength of TiN. It is of great technological importance to develop effective methods of TiCN coatings production under real industrial conditions
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