Abstract

Effect of nitrogen plasma composition on structural-phase and elemental composition, topography, mechanical and hydrophobic properties of coatings on the basis of nitrogen-containing titanium oxide during penetration onto sample in open atmosphere is studied. It has been shown that at an equally high microhardness of the order of 25--27 GPa, by controlling the composition of the nitrogen plasma, either hydrophilic (contact angle 73o)) or hydrophobic coatings (contact angle 120o)) can be formed. Keywords: hydrophobicity, hydrophilicity, titanium dioxide, sapphire, low-temperature plasma, nitrogen, contact angle, microhardness.

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