Abstract
It has been found that low-temperature annealing in air changes the defect structure of YSZ10 oxide nanoparticles synthesized by means of the laser evaporation of a ceramic target. The study is carried out with the use of deuterium probes. At a temperature of 350 ℃, with increasing annealing time, a monotonic decrease in the concentration of oxygen vacancies near the surface of nanoparticles is observed. This dependence is extreme at 200 ℃; at its first stage, the concentration of vacancies in the surface atomic layer of nanoparticles increases with time. An approach is proposed for the synthesis of nanoparticles with severe oxygen deficiency near the surface of oxide
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