Abstract
Abstract Diamond-like carbon (DLC) films have been fabricated by pulsed laser deposition (PLD). The effect of the laser fluence and the substrate temperature on the properties of DLC films was systematically investigated. The substrate temperatures in the range of room temperature to 600°C were varied systematically to observe the effect of substrate temperature on the property of DLC films. Also, film depositions at laser fluences from 6 to 17 J cm −2 were investigated. High-quality DLC films were obtained with the deposition parameters of substrate temperature of 300°C and laser fluence of 12 J cm −2 .
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