Abstract
Abstract The effect of ionizing radiations on semiconductor thin films has been less investigated.1.2 In Ref. 1 the authors studied the effect of electron irradiation on the resistivity of thin epitaxial silicon films. The effects of electron irradiation at energies varying between 11 keV and 100 keV confirmed those obtained with monocrystals.3 The variation of electrical conductivity and of the distribution of carriers in the silicon epitaxial thin films due to the simultaneous action of silicon ion implantation and evaporation in vacuum was studied in Ref. 4.
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