Abstract
Amorphous carbon films on the SiO 2 substrates have been implanted with C ions with energy of 110 KeV and fluences ranging from 1×10 16 to 1×10 17 C cm −2. The effect of ion mixing on the friction behavior of amorphous carbon film and changes in chemical composition and structure were investigated. The results show that the anti-wear life and adhesion of amorphous carbon films on SiO 2 substrate were significantly increased by C ions implantation, especially when the fluence reached 1×10 17 C cm −2. The Si–C chemical bonding across the interface plays the key role in the increase of adhesion strength and the anti-wear life of amorphous carbon film. The friction and wear mechanism of the amorphous carbon film under dry friction was also discussed.
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