Abstract
Double crystal rocking curves from a thin epitaxial layer of GalnAsP on InP have been studied in the highly asymmetric, glancing incidence, Bragg geometry. While a simulation based on a single layer fits the data quite well, a slightly better fit to the data is obtained by assuming the presence of a thin, highly mismatched, interface layer. The interface layer, however, significantly affects the main layer peak position. Very similar rocking curves are found for substantially different structures. We examine the implications for the determination of main layer composition from mismatch measurement.
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