Abstract
Herein, a 3D stability diagram is established in the AlON system. Based on that, four sets of experiments with different Al contents are designed to prepare different inclusions. Subsequently, the agglomeration behavior of inclusion is observed in situ by using confocal laser scanning microscopy (CLSM) combined with an infrared image furnace. The sample with inclusions is heated to melt and the agglomeration behavior of inclusion is recorded by the CRT monitor of CLSM. The calculated agglomeration force of inclusion shows that when the Al content increases from 0.5 to 3 pct, the agglomeration force of Al2O3 inclusions decreases from 7.2 × 10−16 ≈ 6.0 × 10−14 N to 1.2 × 10−16 ≈ 3.2 × 10−15 N. As the Al content increases from 6.5 to 10 pct, the agglomeration force of AlN inclusions increases from 2.2 × 10−17 ≈ 1.1 × 10−15 N to 1.7 × 10−16 ≈ 7.9 × 10−15 N. The theoretical calculation also shows that the agglomeration force of Al2O3 inclusions decreases and that of AlN inclusions increases with the increasing Al content. When the Al content is >4.7 pct, the agglomeration force of AlN inclusions is larger than that of Al2O3 inclusions.
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