Abstract
The incident angle dependence of the magnetic properties of vacuum-deposited Co-Cr was investigated. Using a vacuum deposition system, continuous films and films were deposited onto polymer substrates in motion and held stationary, respectively, with the incident angle of evaporated atoms varying from 70° (initial) to 40° (final). In fixed films, which were cut into small pieces to perform measurements of regions in angular intervals of 2.5° the hep c-axis dispersion increases and the shape magnetic anisotropy increases with increasing angle of incidence. In films, both magnetocrystalline anisotropy and shape magnetic anisotropy contribute to the magnetic anisotropy. Compared with fixed films, the magnetic properties of are influenced by the initial film growth region at incident angles above 60°.
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More From: IEEE Translation Journal on Magnetics in Japan
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