Abstract
Zinc oxide thin films are prepared by spin-coating sol-gel method. Warm air flow is used as a first step in the drying procedure during the preparation of a part of the films. Post-deposition irradiation of some films with infrared pulse laser is also applied. Spectroscopic ellipsometry, X-ray diffraction and conductivity measurements are used to get information about the influence of the laser irradiation and the usage of the warm air flow on the properties of the films. It is shown that all films are nanocrystalline and the treatment with warm air flow and laser beam irradiation improves films crystallinity and reduces their conductivity. The results are related to lower porosity and smaller amount of defects in treated films.
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