Effect of hydrophobicity on the stability of sol–gel silica coatings in vacuum and their laser damage threshold

Abstract

Silica antireflective coatings modified by hexamethyldisilazane (HMDS) were deposited on clean substrates (silicon wafer or K9 glass blanks) by sol–gel processing. The effects of HMDS on the contamination resistant capability and laser-induced damage threshold (LIDT) of coatings were investigated. Transmission electron microscopy revealed that a stable sol with uniformly distributed silica particles with an average particle size of about 15 nm was acquired by adding appropriate amount of HMDS into the standard SiO2 sol. With the modified sol the resultant coatings were hydrophobic and the contact angle for water increased with increasing amount of HMDS in the reaction mixture. Such increase in hydrophobicity was not the result of surface roughness. The antireflective properties were retained after HMDS-treatment and the maximum transmission values were above 99 %. The introduction of HMDS into silica sols had also increased the LIDT of coatings from 24.3 to 37.0 J cm−2 when the molar ratio of HMDS to tetraethoxysilane was 0.05:1. The increase in LIDT was attributed to the decrease of nodular defect and uniform microstructures of coatings as an effect of the HMDS modification. After some of the hydroxyl groups on the surface of the SiO2 particle were replaced by methyl groups, from which the SiO2 particle gained a water-repellent surface, the stability of coatings in vacuum was increased. The maximum transmission values of modified coatings decreased by only 0.25 % after storage under vacuum for 168 h. In contrast, the standard sol–gel silica coatings decreased about 2 % under similar conditions. The LIDT of modified coatings remained as high as 30.8 J cm−2, more than that of standard coatings stored for the same duration in air.