Abstract
We have studied the effect of hydrogen dilution of the rf glow discharge gas mixture on the properties of amorphous silicon carbon a-Si 1−xC x:H films. The chemical bonding structure has been determined from infra-red (IR) absorption structural analysis. Elastic Recoil Detection (ERD) was used to determine the composition. It is shown that hydrogen dilution reduces the density of CC bonds rather than the density of CH n species.
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