Effect of hydrocarbon molecular ion size for amorphous region formation analyzed by X-ray photoelectron spectroscopy

Abstract

We investigate the amorphous formation behavior on hydrocarbon molecular ion implantation conditions such as hydrocarbon molecular ion size by X-ray photoelectron spectroscopy (XPS). The cross-sectional radius of the amorphous region was obtained from the peak intensity of the amorphous component in Si 2p spectra analyzed by XPS, and using columnar formula for a model. We confirmed that the cross-sectional radius of the amorphous region formed by hydrocarbon molecular ions differs greatly from that formed by monomer carbon ions, and increases by 0.078 nm as the number of carbon atoms composing the hydrocarbon molecular ion increases. The dependence of amorphous formation on the hydrocarbon molecular size is related to the C–C binding distance, and the ratio of increase in the amorphous cross-sectional radius corresponds to half of the C–C binding distance. Therefore, the collision behavior of hydrocarbon molecular ions during implantation predominantly influence the size of hydrocarbon molecular ions.