Effect of hybrid oxidation on the titanium oxide layer's properties investigated by spectroscopic methods

Abstract

In this work the study of hybrid Ti Grade 2 during oxidation using FADT – fluidized bed atmospheric diffusive treatment and PVD – magnetron sputtering have been investigated. Additionally, the influence of the oxidation method on the change in the mechanism of oxygen transport to the substrate have been discussed (phenomenon responsible for the improvement of bioactivity). Presented method consists in forming the titanium surface layer saturated with oxygen due to the diffusion and deposition of a thin homogeneous oxide coating on the Ti surface. Discussed processes diminish the surface roughness and increase bio-compatibility of the surface, which results in easier hydroxyapatite cluster deposition. The diffusion process was conducted on Al2O3 fluidized bed, with air as the fluidizing factor at 913 K for 8 h. The deposition of the oxide coatings were carried out with magnetron sputtering, with the use of a TiO2 target at a pressure of 3 × 10−2 mbars and power of 350 W. To evaluate the effects of hybrid oxidation and to determine the mechanism of oxygen transport, the following research methods have been applied: spectroscopy (GDOS, SIMS, RS), microscopic methods (SEM-EDS, SEM-EBSD, TEM-EFTEM), X-ray tests (μ-XRD, GID). Obtained test results were used to identify the type of oxide coatings, to assess the thickness of the layers and to study the influence of crystallographic orientation on oxygen transport and concentration in the surface layer and in the oxide coating. It has been found that the formation of oxide coatings created by using the hybrid method (FADT + PVD leads to a change in oxygen concentration in the substrate due to introduced defects. This phenomenon is in opposition to the conventional methods such as: electrochemical or laser oxidation. In contrast, forming a tight homogeneous oxide coating on Ti surface improves the biocompatibility, which is particularly important in the context of biomedical applications.