Abstract
Abstract Radiation damage near the surface of rutile (TiO2) single crystals irradiated with 360 keV Xe2+ ions has been studied by combining Rutherford back-scattering spectroscopy and ion channelling (RBS/C) analyses with direct observations using transmission electron microscopy (TEM). lrradiations were performed at ambient temperature on TiO2 single crystal surfaces with (110) and (100) orientations, using ion fluences of up to 7 × 1019 Xe ions m−2. The RBS/C spectra revealed two damage peaks: one peak due to a surface damage layer and a second peak due to a buried damage layer near the mean projected range of the implanted ions. Cross-sectional TEM and high-resolution electron microscopy revealed that the surface damage layer consists of TiO2 crystallites with different orientations compared with the original single crystal.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
