Abstract
Ti-Ni shape memory alloy thin films were formed by sputtering using a Ti-Ni alloy target. The thickness of the films was 7.6 μm. The films have been subjected to several types of heat-treatments in order to investigate the effect of heat-treatment on the transformation temperatures and the shape memory behavior associated with R-phase and martensitic transformations, respectively. The shape memory behavior was investigated by measuring strain change associated with R-phase and martensitic transformations respectively during cooling and heating under a constant stress. All these films showed perfect shape recovery upon heating. The stress vs. temperature relationship for each film was linear, indicating the Clausius-Clapeyron relationship. Heat-treatment were found to be effective to vary the transformation temperatures and deformation behavior.
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