Abstract
The molybdenum nitride (MoN) film with multiphase structure (Mo2N, MoN and Mo) was successfully prepared using magnetron sputtering. The mechanical and tribological performances of the MoN film were both further improved by C-doping and heat treatment. The results show that compared to the MoN film, the MoCN film has smoother and denser microstructure, lower friction coefficient and wear rate, and an increased hardness of 28 GPa. The improved performance exhibited by the MoCN film is mainly attributed to the lubricating effect of forming amorphous carbon after doping with C element and high hardness of the sp3 CC hybrid bond. However, different results exhibited on the MoN and MoCN films after heat treatment at 400 °C. Both the mechanical and tribological properties were improved in the MoN film but reduced in the MoCN film. This may be related to different crystallization of Mo and the change of amorphous carbon in the different film. This suggests that heat treatment is of great importance to the properties of MoN and MoCN films.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
