Effect of graphite and Mn3O4 on clay-bonded SiC ceramics for the production of electrically conductive heatable filter

Abstract

Electrically conductive porous SiC ceramics are attracting substantial attention due to their application in heatable filters, vacuum chuck, and semiconductor processing parts, etc. The main problem is their high processing cost. Ideal candidates from an engineering ceramic perspective will be mechanically durable and have the required electrical properties with sufficiently low fabrication costs. To decrease the sintering temperature, kaolin has been added, but it tended to render the material an insulator. Graphite was used to effectively decrease the electrical resistivity. Additionally, manganese oxide was used to decrease the quantity of kaolin (the component that leads to an insulator material after sintering) and decrease the electrical resistivity while maintaining the mechanical properties. In our study, we found that SiC with 35% kaolin, 20% graphite and 10% manganese oxide can produce samples with 6.5 × 10−1 Ω cm electrical resistivity and 43.5 MPa flexural strength at a low sintering temperature of 1200 °C.