Abstract
Thin films of phase-pure perovskite PLT [(Pb 0.72La 0.28)Ti 0.93O 3] were deposited in-situ onto Pt(1 1 1)/Ti/SiO 2/Si(1 0 0) substrates by pulsed laser deposition from a stoichiometric target. We have systematically investigated the variation of grain sizes depending on the process conditions. The grain sizes of PLT thin films were changed from 110 to 350 nm by changing annealing process parameters and by using a two-step deposition process. We confirmed that grain sizes were varied under these deposition conditions. C– V measurements, polarization loops, leakage current measurements and scanning electron microscopy were performed to investigate the electrical and microstructural properties of (Pb,La)TiO 3 films.
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