Effect of gas pressure and film thickness on the optical constants of transparent conducting oxide based on zinc oxide

Abstract

Thin films of aluminum zinc oxide are prepared using DC magnetron sputtering. It was found that changing the thickness of the film as well as the pressure of the argon affects the transmittance, optical gap, width of the band tails of the localized state, refractive index, and real and imaginary parts of the dielectric function. The real and imaginary parts of the optical conductivity as well as the volume and surface energy loss functions are investigated in light of changing the thickness of the films and argon pressure.