Abstract
In this work, high-quality and highly pure titanium dioxide nanostructures were synthesized by a homemade dc closed-field unbalanced reactive magnetron sputtering system. The operation parameters of the magnetron sputtering system were optimized to prepare TiO2 nanostructures as thin films on glass substrates. These nanostructures were characterized by x-ray diffraction, atomic force microscopy and Fourier-transform infrared spectroscopy. Both anatase and rutile phases were identified. The mixing ratio of argon and oxygen (Ar:O2) gases was found very important to control the structural characteristics of the prepared nanostructures.
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