Abstract
We report on the study on effect of Ga pre-deposition rate on GaAs nanowires grown by self-assisted vapor-liquid-solid (VLS) method. Ga droplets were initially deposited on the surface of Si(111) substrates covered with thin layer of SiO2. The nanowires were grown by molecular beam epitaxy (MBE). Dependency of structural of nanowires on Ga pre-deposition rate is investigated by Scanning Electron Microscope (SEM), Energy-dispersive X-ray spectroscopy (EDX), and X-ray Diffraction Analysis (XRD). The experimental results show that the different in Ga pre-deposition rate significantly affect the surface morphology of samples. Growth rate and the density of nanowires strongly depends on the Ga pre-deposition rate.
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