Effect of Free Radicals on Irradiation Chemistry of a Double-Coordination Organotin (Sn 4 ) Photoresist by Adjusting Alkyl Ligands

Hao Chen, Xiaojun Peng + Show 9 more

https://doi.org/10.31635/ccschem.024.202303616

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Publication Date: Jan 23, 2024

Abstract

Effect of Free Radicals on Irradiation Chemistry of a Double-Coordination Organotin (Sn <sub>4</sub> ) Photoresist by Adjusting Alkyl Ligands

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