Abstract
AISI 440C stainless steel along with pure iron and chromium have been implanted with 30 keV fluorine ions at doses from 5 × 10 16 to 6 × 10 17 ions/cm 2 and surface hardnesses of the 440C steel have been examined. Implanted regions inside the specimens were studied by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The results of XPS and XRD measurements indicate the formation of FeF 2 and suggest small grains of CrF 2 and non-stoichiometric chromium fluorides in 440C steel. It may be concluded that an increase of the surface hardness in fluorine implanted 440C steel is related to precipitation of metal fluorides and surface oxidation.
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