Abstract
Transparent electrically conducting tin oxide and fluorine doped tin oxide films were deposited on alkali-free corning borosilicate glass plates using ethanol and water mixture as solvent by spray pyrolysis in the temperature range 375–450°C. The structural, electrical and optical properties of these films were determined as a function of dopant incorporation in the basic spraying solution and the substrate temperature. Almost in all the cases the films were preferentially oriented along [1 1 0]. The visible transmittance as well as the electrical resistivity of the films decreased with the increase in the fluorine concentration. It has been observed that the best electro-optic properties, average transmittance of 88% and electrical resistivity of 10 −3 Ω cm, were achieved with the fluorine doping concentration of around 57 at% in the solution at the optimized substrate temperature of 425°C.
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