Effect of fluid composition on nanofinishing of single-crystal silicon by magnetic field-assisted finishing process

Abstract

Magnetic field-assisted finishing is a deterministic process particularly used for finishing optical materials. The main component of this process is magnetorheological fluid which consists of magnetic particles, abrasive particles, carrier fluid such as water or oil, and some additives to impart stability. Under the influence of magnetic field (generated by either permanent magnet or electromagnet), magnetic particles form chain-like structure and support many abrasive particles to perform finishing of workpiece surface. Selection of abrasive and carrier fluid in this process is one of the major concerns which play vital role on finishing mechanism and surface quality. In the present experimental investigation, aluminum oxide and cerium oxide are chosen as abrasives while deionized water and paraffin oil are selected as carrier fluids. A set of experiments are carried out to study chemical interactions of abrasive and carrier fluid on the silicon surface. A rheological study is carried out to study behavior of magnetorheological fluid fluids under magnetic field.