Effect of feed velocity change on amount of material removal for free abrasive polishing with sub-aperture pad

Abstract

The polishing convolution theory is widely used in CCOS optical manufacture. In the paper, it is found that the practical amount of material removal is largely different to the theoretical results when the polishing pad does an accelerated motion. The change of the feed rate will cause a huge deviation while the change of the direction will not cause the deviation. Several experiments have finished by using ABB robot polisher and laser interferometer. The cause of the deviation primarily lies in the accumulation of the abrasive grains. To ensure the stability of the amount of material removal in the sub-aperture polishing process, the large change of feed rate should be avoided and the effect on the change of direction can be neglected.