Abstract
In this work, a systematic photoluminescence (PL) study on three series of gallium oxide/aluminum gallium oxide films and bulk single crystals is performed including comparing doping, epitaxial substrates, and aluminum concentration. It is observed that blue/green emission intensity strongly correlates with extended structural defects rather than the point defects frequently assumed. Bulk crystals or Si-doped films homoepitaxially grown on (010) β-Ga2O3 yield an intense dominant UV emission, while samples with extended structural defects, such as gallium oxide films grown on either (-201) β-Ga2O3 or sapphire, as well as thick aluminum gallium oxide films grown on either (010) β-Ga2O3 or sapphire, all show a very broad PL spectrum with intense dominant blue/green emission. PL differences between samples and the possible causes of these differences are analyzed. This work expands previous reports that have so far attributed blue and green emissions to point defects and shows that in the case of thin films, extended defects might have a prominent role in emission properties.
Highlights
In this work, a systematic photoluminescence (PL) study on three series of gallium oxide/aluminum gallium oxide films and bulk single crystals is performed including comparing doping, epitaxial substrates, and aluminum concentration
Even though the films were grown on (010) oriented β-Ga2O3 and tend to be homogeneous, the aluminum-gallium oxide (AGO) films analyzed here, which were produced on the same substrate, show many extended defects as seen in the Fig. 7 Scanning Transmission electron microscopy (TEM) (STEM) image
There is no difference between the 10% AGO and 25% AGO dominant blue PL emission, even though the number of point defects has changed between samples
Summary
A systematic photoluminescence (PL) study on three series of gallium oxide/aluminum gallium oxide films and bulk single crystals is performed including comparing doping, epitaxial substrates, and aluminum concentration. The last series compares (010) oriented ( AlxGa1−x)2O3 films, i.e., AGO of varying Al concentrations, grown on Fe-doped β-Ga2O3.
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