Abstract

Effects of 2MeV electron irradiation on electrical properties of CuInSe2 thin films have been investigated, n-type CuInSe2 films in which carrier concentration were about 2×1017cm-3, were epitaxially grown on GaAs(001) substrate by RF diode sputtering. No significant change in the electrical properties was observed under the electron fluence less than 1016cm-2. As the electron fluence exceeded 1017cm-2, both carrier concentration and Hall mobility slightly decreased. The carrier removal rate was determined to be about 1cm-1, which is lower, compared to III-V compound materials.

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