Abstract
In dual-frequency capacitive discharges, the effect of electron heating mode on charge-up damage is investigated through a 3-D charge-up simulator coupled with a 1-D particle-in-cell Monte Carlo collision simulation. The local charge-up damage on the trench decreases as the electron heating mode is changed from collisionless to collisional heating.
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Schedule a callMore From: IEEE transactions on plasma science. IEEE Nuclear and Plasma Sciences Society
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