Abstract
We discuss the effects of electron energy distribution function (EEDF) on the number densities of excited states of Ar I in a microwave discharge argon plasma in the pressure range of 0.1 to 10 Torr. We experimentally generate the microwave discharge argon plasma and find the electron temperature and density to be 5–12 eV and (1 -4)×1011 cm-3, respectively. Single probe analysis also shows that its EEDF is approximately Druyvesteynian, but with a large uncertainty. We measure the number densities of excited states of Ar I by spectroscopic examination. For numerical analysis, we obtain the number densities of the excited states by using a collisional radiative model, substituting experimentally observed electron temperature and density. The number densities of excited states calculated by the collisional radiative model agree well with the experimental ones when we adopt the Druyvesteynian distribution as EEDF, whilst the Maxwellian distribution gives poor results.
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