Effect of electric charge deposition on the plasma radiation of micro-gap DBD

Abstract

Summary form only given. Strong dielectric barrier discharge are formed in micro-gap, which the reduce field is /spl ges/400 Td (1Td=10/sup -17/ Vcm/sup 2/), the average electron energy is /spl ges/10 eV, and electron density is /spl ges/10/sup 15//cm/sup 3/. Plasma radiation speciality is one of important parameter to indicate the plasma state and performance, which is studied to the micro-gap DBD at high pressure using CCD image method. With the optimization of discharge parameters, the self-organized effect of DBD plasma is controlled in this paper. The results are as following. (1) The electric charges on the dielectric layers surface are mainly the electrons, which have a great effect on DBD plasma processing of formation and evolvement. (2) For the single dielectric layer, the partial self-induction electric field formed by the surface deposition charges cause the obvious radiation of micro streamer discharge. (3) For the double dielectric layers, the self-organized speciality of the surface deposition charges forms two uniformity charge layers on the dielectric surfaces. The charge layer efficiently adjusts the electric field intensity of DBD to make it relative uniform. (4) The radiation effects of micro-gap DBD are observed with the different DBD configuration and ionization gases of N/sub 2/, O/sub 2/, H/sub 2/, H/sub 2/O. All formation processing has the character of streamer micro-discharge but not to be the true glow discharge of atmospheric pressure. The uniformity radiation in double dielectric layer forms a kind of discharge just like the glow due to the self-organized effect that is formed with large numbers of the micro streamer discharge charge deposited on the dielectric layer.