Abstract
We have developed a piezoelectric microactuator for dual-stage actuator systems in magnetic disk drives. We installed the microactuator in one of Fujitsu's 3.5-inch commercial drives for evaluation of the servo system of dual-stage actuator. The dual-stage actuator system achieved the nonrepeatable position error (NRPE) 3/spl sigma/ values of 0.036 /spl mu/m. The dual-stage servo system reduced the NRPE by 35% compared with the conventional single actuator system even in HDD's which has a high rotational speed of 10,000 rpm.
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