Abstract
This paper reports the effect of droplet boundary behaviors on surface acoustic wave (SAW) attenuation for potential microfluidic applications based on an aluminum nitride (AlN) thin-film SAW device. The SAW responses as functions of liquid volume, viscosity, position and dynamic change of droplet shape during the evaporation process have been investigated. It has been shown that when a droplet is put on the wave path, the SAW is attenuated and the SAW attenuation depends more on the droplet contact diameter than on contact angle. However, when the droplet contact diameter is larger than the SAW attenuation length in water, for multiple droplets on the wave path, the SAW attenuation is determined by the liquid contact width rather than the contact area. Moreover, the results also show that SAWs are mostly concentrated in the area between two reflectors and propagate along the middle of wave path.
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