Abstract
TiN coatings were prepared under different deposition time by magnetron sputtering technology. The effects of deposition time on microstructure and properties of TiN coatings were investigated by SEM, EDS, XRD, micro-hardness tester and scratch instrument, respectively. Results showed that coating thickness was gradually increasing with the prolonging of deposition time; The phases were mostly cub-TiN and a small amount of metal hex-Ti and tetr-Ti2N in TiN coatings; Deposition time has a great influence on surface morphology of TiN coatings; The hardness and adhesion of TiN coating both increased firstly and then decreased with the increase of deposition time. In this paper, TiN coating, whose thickness was 4 mm when deposition time was 5 hour, had excellent comprehensive performance, i.e., TiN coating was dense and smooth and its composite hardness was 34.46 GPa and its adhesive force was 16.00 N.
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