Abstract
The relationship between CVD deposition temperature and the resulting deposit's crystallinity and superconducting characteristics was examined for Y-Ba-Cu-O films prepared on SrTiO 3 (100) single-crystal substrates. The source materials used in the CVD process were β-diketone metal chelates. The crystallinity was evaluated from an integral width of a (007) X-ray diffraction peak of YBa 2Cu 3O 7− x deposited at 600–900°C. The films deposited at 750–900°C showed not only a higher crystallinity level than that of the films deposited at 600–700°C but also exhibited superconductivity. The highest level of crystallinity, the highest zero-resistance (T c = 91.5 K) and the highest critical-current density (3.9 × 10 5 A/cm 2) at 77.3 K and 0 T were measured for the film deposited a 850°C. This film consisted of mostly c-axis oriented grains with a few a-axis oriented grains.
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