Effect of deposition pressures on uniformity, mechanical and tribological properties of thick DLC coatings inside of a long pipe prepared by PECVD method

Abstract

Diamond-like carbon (DLC) coatings, as an excellent wear-resistant and low friction material, have been successfully applied as the surface protection and lubrication of various components. Recently, its application in the pipe fittings has gradually attracted the attention of the industry. In this paper, a plasma enhanced chemical vapor deposition (PECVD) technology was used to deposit a thick Si/Si-DLC/DLC multilayer composite coating inside a high aspect ratio pipe. The experimental results showed that the structures and properties of coatings strongly depended on deposition pressures. As the deposition pressure increased, the average thickness of the coating increased from 17 μm (50 mTorr) to 21.2 μm (110 mTorr) and its uniformity deviation continued to decreased until the pressure exceeded 100 mTorr, which reached the minimum value of 35.3%. When the deposition pressure rose, the coating hardness peaked at about 18.11 GPa (70 mTorr), and then it decreased to 14.86 GPa (110 mTorr). The friction coefficient and wear rate of the coating first decreased to 0.12 and 7.37 × 10−9 mm3/Nm (70 mTorr), respectively, and then slightly increased as the deposition pressure increased. In addition, the DLC coating we deposited also achieved a high adhesion strength of about 32 N (70 mTorr). In summary, the coating prepared at 70 mTorr had the best overall performance and was promised to be applied in pipeline protection industry.