Abstract
This study examined the tribological behavior of a ta-C coating fabricated at a substrate bias of −100 V via filtered cathodic vacuum arc (FCVA) deposition. Defects in the ta-C coating were categorized as droplets, pores, and spikes, considering the morphological, structural, and mechanical properties of the ta-C surface. A friction test was conducted at 170 °C in ambient air using a ball-on-disk tribometer. The friction coefficient was 0.08 during the steady state and the wear rate was 4.3 × 10−6 mm3/Nm. To explain the friction and wear behavior, the morphological and structural properties of the defects in the designated area were compared among different sliding cycles.
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