Abstract

Cr2O3 coatings were prepared by vacuum cathodic arc deposition (VCAD) on cemented carbide YT15 at different voltages of both direct current (DC) and radio frequency (RF) bias. The structure and properties of the coatings were investigated by scanning electron microscope, X-ray diffraction, and nanoindentation. With both DC and RF bias, coatings deposited at zero and low bias voltage exhibit a columnar structure and a preferred orientation (PO) of (104). As the bias voltage increases, the columnar structure starts to disappear and PO gradually becomes (006). Besides, the crystallite size of the coatings declines as the bias voltage increases. Comparing to DC bias, the RF bias leads to smaller crystallite size by virtue of higher energy and density of ion bombardment. The electrical resistivity of the coatings and saturation ion current density during deposition were measured to explain this effect. The hardness of the coatings was significantly enhanced by the bias voltage, particularly by the RF bias. A nano-hardness of 44.7 GPa was found in the coating deposited under −100 V RF bias, which has not been previously reported.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.