Abstract
The damage production rate is an important factor in the diffusion of different species during implantation, for instance O-ion PBII of Al and its alloys. In this experiment, we try to distinguish the effect of purely radiation-enhanced diffusion (RED) from the synergistic effect between RED and Mg segregation driven by oxidation observed in earlier work with Mg-containing Al alloys. We investigated the influence of the irradiation damage on pure Al for which no segregation effect can occur. We used different gas compositions [O 2, Ar, Ar(10%O 2) and Ne(10%O 2)] to provide simultaneous species implantation and a variable ratio of damage to active ion implantation rate. The effect of the damage rate on the O implanted profiles was measured by XPS. Following implantation with an Ar(10%O 2) plasma, a very significant inward displacement of the peak concentration was observed. Analysis of the profiles leads to the conclusion that a purely RED effect is involved in this O migration.
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