Abstract
Effect of the D~+ ion beam on Ti film is studied by radiating the Ti films with different energy D~+ beams on electrostatic accelerator.Slow positron annihilation spectroscopy and SEM are used to characterize the films.With the D~+ beam energy increases,the extent of radiation damage and the surface ablation of Ti films increase.The maximum of radiation damage locates at 0.3μm depth.The geometrical non-uniformity on original surface is the main reason for the ablation behavior on Ti films by inducing a selective ablation under radiation.Radiation damage and energy loss of D~+ in Ti film are discussed in detail by the numerical simulation of the beam and the solid interaction. It shows that the maximum radiation damage is at 0.65μm depth and energy loss of D~+ beam in Ti films accords with the experimental observation.
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