Abstract

ZnO nanopillar-films were crystallized at various crystallized temperatures (600-700 ℃). With increasing the crystallizing temperature, the quality of ZnO crystallization can not only improved, but the ZnO nanopillars also grew significantly and the length was around 30~150nm. Notably, a severe decomposition reaction reduced the total volume of crystallized matrix (residual ZnO films and increased ZnO nanopillars). The 650 ℃ film not only possessed better crystallized structure, but also had the efficacy of nanopillars that enhanced the optical characteristics.

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