Abstract
L 1 0 ordered FePt thin films with face-centered-tetragonal (001) texture have been prepared by magnetron sputtering on Cr100−xWx underlayer. The dependence of Cr100−xWx microstructure and FePt texture on the W content in the Cr underlayer was investigated. The addition of W element in Cr underlayer enhances the Cr (200) texture and increases the lattice constant of Cr, which is favorable for lowering the transformation temperature from fcc to fct phase because of the increase of the tensile stress along the FePt a axis. A good FePt (001) texture is obtained on the Cr85W15 underlayer with a substrate temperature of 400°C. The coercivity of FePt thin films on CrW underlayer is higher than on Cr underlayer and increases with increasing W content in the Cr underlayer because the formation of the CrW alloy inhibits the diffusion between FePt and CrW layer. A 5nm Pt intermediate layer was employed to suppress the diffusion between FePt and CrW underlayer further.
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