Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar+

Abstract

The temperature of the magnetron-sensitive components should be kept below the threshold limit during sputtering. Overheating over the Curie-temperature of the magnets can occur if the heat generated in the magnetron is not sufficiently dissipated, causing the collapse of the entire sputtering process can occur. To ensure proper dissipation of the heat generated in the magnetron and understand the process, we proposed 3D model, through which we were able to model the process and determine the heat source on the surface of the target using Monte Carlo simulation. With the target being a heat source in the magnetron, using Computational fluid dynamics model with Fourier's-law, we simulated the heat transfer inside a magnetron and validated the simulation results by measuring the temperature using a thermal camera. Then we analyzed the heat fluxes and heat exchange with different cooling-water paths, and we explained their effect on the heat transfer inside a magnetron. The results indicate that according to the calculation criteria, an appropriate design must be selected that ensures that the cooling-water reaches the heat source to maximize heat dissipation and keep the temperature below the Curie-temperature level of the magnets. Engineers and researchers can use this model to optimize process efficiency and explore new designs, while at the same time reducing the need for costly experimental trials.