Abstract
The In2O3–Ga2O3 mixed oxide polycrystalline thin films with various ratios of components were obtained by pulsed laser deposition. The effect of films composition on surface morphology, electrophysical and gas sensing properties and energies of adsorption and desorption of combustible gases was studied. The films with50%In2O3–50%Ga2O3 composition showed maximum gas response (∼25 times) combined with minimum optimal working temperature (∼530 °C) as compared with the other films. The optical transmittance of the films in visible range was investigated. For 50%In2O3–50%Ga2O3 films, the transmittance is higher in comparison with the other films. The explanation of the dependency of films behaviors on their composition was presented.The In2O3–Ga2O3 films were assumed to have perspectives as gas sensing material for semiconducting gas sensors.
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