Effect of CoFeB electrode compositions on low frequency magnetic noise in tunneling magnetoresistance sensors

Abstract

We study the effect of CoFeB electrode compositions on frequency dependent magnetic noise in tunneling magnetoresistance sensors with variable field sensitivity. We use the relationship between the normalized 1/f noise parameter (αt) and the magnetoresistance sensitivity product (MSP) to compare the magnetic noise of sensors with Co40Fe40B20, Co60Fe20B20, and Co20Fe60B20 electrodes. We observed the lowest slope of the αt vs. MSP curve of 9.1 × 10−13 μm3 T and a 1/f noise corner as low as 300 Hz for the sensors with Co60Fe20B20 electrodes. Furthermore, all sensors at a specific value of the magnetoresistance sensitivity product showed a deviation from the linear relationship between αt and MSP. The results show that in the design of high sensitivity CoFeB-MgO-CoFeB based tunneling magnetoresistance sensors for low field detection, selection of CoFeB electrodes is important and can be used to significantly improve the low frequency field detection limit.