Abstract
Many efforts to improve the tribological properties of amorphous carbon films have been reported. We used chlorine doping to reduce the friction coefficient of amorphous carbon films under non-lubricated conditions. This forms chlorine compounds, such as chlorinated tribofilm, at the sliding interface between films and counter parts. A friction test indicated a lower friction coefficient and lower attackability for chlorine-containing amorphous carbon films compared with hydrogenated amorphous carbon films. Time-of-flight secondary-ion mass spectroscopy (TOF-SIMS) confirmed the existence of chlorine-bonded ions along the wear track of chlorine-containing amorphous carbon films suggesting that chlorinated compounds improve the friction properties of these films.
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