Abstract
Heterophase textured films of vanadium dioxide on single-crystal silicon substrates have been synthesized by the sol-gel method from solutions of triethoxyvanadyl VO(OEt)3 in methyl cellosolve CH3OCH2CH2OH. The effect of ozone and ethanol vapor chemisorption on the parameters of the semiconductor-metal phase transition in vanadium dioxide VO2(B) has been studied. It has been found that the transition temperature increases in a reducing atmosphere and decreases in an oxidizing atmosphere.
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