Abstract
The mechanical properties of porous Si 3 N 4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si 3 N 4 , BN and B 4 C coatings. The dielectric constant and loss of porous Si 3 N 4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si 3 N 4 , but increase greatly after CVD of B 4 C. Overall, CVD of Si 3 N 4 performs better than CVD of BN and B 4 C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si 3 N 4 ceramic.
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