Abstract
Exposing active Spindt-type molybdenum field emission microcathode arrays to CH4 resulted in increased electron emission. Exposures of 250 and 2500 L result in electron emission enhancement of 106.2±41.0% and 200.1±20.7% and a decrease in tip work function by 10.2±5.6% and 17.6±1.7%, respectively. The measured work function changes indicate the formation of molybdenum carbides on the field emitter tips.
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More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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